MEMS device with electrodes and a dielectric

ABSTRACT

A MEMS device can include a first support layer, a second support layer, and a solid dielectric suspended between the first support layer and the second support layer. The solid dielectric can move relative to the first support layer and the second support layer and can include a plurality of apertures. The MEMS device can include a first plurality of electrodes coupled to the first support layer and the second support layer and extending through a first subset of the plurality of apertures. The MEMS device can include a second plurality of electrodes coupled to the first support layer and extending partially into a second subset of the plurality of apertures. The MEMS device can include a third plurality of electrodes coupled to the second support layer and extending partially into a third subset of the plurality of apertures.

BACKGROUND 1. Field

The present disclosure is directed to a microelectromechanical systems (MEMS) device with electrodes and a dielectric.

2. Introduction

Presently, consumer electronic devices like mobile phones, personal computers, smart speakers, hearing aids, and True Wireless Stereo (TWS) earphones among other host devices commonly incorporate one or more small microphones, sensors, and/or actuators. Advancements in micro and nanofabrication technologies have led to the development of MEMS devices, such as microphones, sensors, and actuators, having progressively smaller size and different form-factors. Increasing the bias voltage of capacitive microphones, sensors, actuators, and other capacitive elements in MEMS devices leads to higher output and other operation, but also increases the tendency towards collapse and increases the mechanical stiffness of the system.

BRIEF DESCRIPTION OF THE DRAWINGS

In order to describe the manner in which advantages and features of the disclosure can be obtained, a description of the disclosure is rendered by reference to specific embodiments thereof which are illustrated in the appended drawings. These drawings depict only example embodiments of the disclosure and are not therefore considered to limit its scope. The drawings may have been simplified for clarity and are not necessarily drawn to scale.

FIG. 1 is an example cross-section view of a MEMS device according to a possible embodiment;

FIG. 2 is an example isometric view of a MEMS device according to a possible embodiment;

FIG. 3 is an example cross-section view of a MEMS device according to a possible embodiment;

FIGS. 4-7 are example isometric views of MEMS devices according to possible embodiments;

FIGS. 8-11 are example cross-section views of MEMS devices according to possible embodiments;

FIG. 12 is an example cross-section view of a sensor package according to a possible embodiment;

FIG. 13 is an example illustration of an application of a MEMS device according to a possible embodiment;

FIGS. 14-15 are example isometric views of a MEMS device according to a possible embodiment;

FIG. 16 is an example isometric view of a MEMS device according to a possible embodiment;

FIG. 17 is an example isometric view of a dielectric layer according to a possible embodiment; and

FIG. 18 is an example isometric view of a dielectric layer according to a possible embodiment.

DETAILED DESCRIPTION

Embodiments can provide a MEMS device with electrodes and a dielectric. According to a possible embodiment, MEMS device can include a first support layer, a second support layer, and a solid dielectric suspended between the first support layer and the second support layer. The solid dielectric can move relative to the first support layer and the second support layer and can include a plurality of apertures. The MEMS device can include a first plurality of electrodes coupled to the first support layer and the second support layer and extending through a first subset of the plurality of apertures. The MEMS device can include a second plurality of electrodes coupled to the first support layer and extending partially into a second subset of the plurality of apertures. The MEMS device can include a third plurality of electrodes coupled to the second support layer and extending partially into a third subset of the plurality of apertures.

At least some embodiments can be based on a dielectric actuator where a dielectric is placed between electrodes at different potentials. The resulting electrostatic force operates to pull the dielectric and electrodes so that the dielectric covers as much of the electrodes as possible thereby maximizing the capacitance between them. The force is proportional to the change in capacitance with displacement and with the square of the voltage.

To elaborate, when a voltage is applied between adjacent electrodes, there is an electrostatic force created to pull the dielectric and electrodes in a manner that more fully engages the dielectric and electrodes. The energy in a capacitor is E=½CV². Moving the dielectric into a gap between the electrodes increases the capacitance. The electrostatic force F=δE/δz=½δC/δz V², where z is the direction of the engagement of the dielectric and the electrodes. The capacitance between electrodes varies linearly as a function of dielectric displacement as long as the dielectric ends do not get too close to the ends of the conductive electrode and as long as the electrodes are ideally shaped. Thus, the electrostatic force produced is constant regardless of the position of the dielectric between the electrodes.

In traditional parallel plate sensors, the electrostatic force varies inversely with the square of the gap between plates. In a MEMS device, such as a microphone, the electrostatic force causes the diaphragm to deflect and thus stiffen as a function of displacement. When a dielectric motor is used as a sensor in a MEMS device, such as a microphone, the electrostatic force produced by the motor can cause the diaphragm to bow and thus contributes to the stiffness of a diaphragm. This additional stiffness is proportional to the square of the applied voltage. The sensitivity of the sensor is also proportional to the applied voltage so there is a conflict between increasing the applied voltage to increase sensitivity and the decreasing mechanical compliance, i.e. increasing stiffness, of the diaphragm. At least some embodiments can provide a dual dielectric motor which can make overall compliance independent of applied voltage, at least to the first order.

One problem in conventional parallel plate MEMS microphones is the tendency for the diaphragm to collapse onto the back plate under high shock or acoustic loads. A dual diaphragm, single back plate microphone can become highly unstable as the diaphragm to back plate gap becomes unequal. Using a dual dielectric motor for sensing can avoid both the electrostatic collapse and the electrostatic stiffening of the diaphragm(s). Some embodiments can use two opposed dielectric motors to balance the electrostatic force between them. In some embodiments, this can allow for large bias voltages with little or no net electrostatic force nor gradient of electrostatic force with position applied between electrodes and the dielectric of a MEMS device.

FIG. 1 is an example cross-section view of a MEMS device 100 according to a possible embodiment. FIG. 2 is an example isometric view of a MEMS device 200 according to a possible embodiment. FIG. 3 is an example cross-section view of a MEMS device 300 according to a possible embodiment. FIGS. 4-7 are example isometric views of MEMS devices 400, 500, 600, and 700 according to possible embodiments. FIGS. 8-11 are example cross-section views of MEMS devices 800, 900, 1000, and 1100 according to possible embodiments. FIG. 12 is an example cross-section view of a sensor package 1200 according to a possible embodiment. FIG. 13 is an example illustration 1300 of an application of the MEMS device 400, or any other disclosed MEMS device, according to a possible embodiment.

Generally, with reference to FIGS. 1-3 , a MEMS device can include a first electrode 110 oriented lengthwise along and parallel to an axis 160. The first electrode 110 can have a first end 111 and a second end 112. The MEMS device can include a second electrode 120 oriented lengthwise along and parallel to the axis 160. The second electrode 120 can have a first end 121 and a second end 122. The MEMS device can include a third electrode 130 oriented lengthwise along and parallel to the axis 160. The third electrode 130 can have a first end 131 and a second end 132. The electrodes 110, 120, and 130 can be cylinders, plates, cuboids, prisms, polyhedrons, or other shapes of electrodes. The length of the first electrode 110 can be longer than the length of the second electrode 120 and longer than the length of the third electrode 130. The MEMS device includes a dielectric 150 interspersed between the electrodes. The dielectric 150 has a plurality of apertures 156 (not shown in FIG. 1 ) that penetrate through the dielectric 150 in a direction parallel to an axis 160. The first, second, and third electrodes can each be located at least partially within an aperture of the plurality of apertures 156. Being located at least partially within an aperture can imply part of an electrode is located within an aperture and/or the electrode is located in part of the aperture. According to a possible embodiment, at least the second and third electrodes can be located only partially within the apertures 156 for the ends to be located outside the solid dielectric 150. The electrodes can be substantially fixed relative to each other. For example, the electrodes can be substantially fixed while allowing for some relative movement due to flexation and other forces. The dielectric 150 and electrodes are free to move relative to each other.

A voltage from a first voltage source V₁ is applied between the first electrode 110 and the second electrode 120 producing a relatively constant force F₁. A voltage from a second voltage source V₂ is applied between the first electrode 110 and the third electrode 130 to produce a relatively constant force F₂. Forces F₁ and F₂ are in opposition. If the structure is relatively symmetric and the magnitude of the voltage sources V₁ and V₂ are equal, forces F₁ and F₂ are equal and thus a net zero force is exerted between the dielectric and the electrodes. The magnitude of the voltages from the voltage sources V₁ and V₂ can be unequal to compensate for asymmetries in the structure or to intentionally create a non-zero net force between the dielectric and the electrodes.

The MEMS device can be a MEMS transducer. For example, the MEMS device can be a sensor or actuator. The MEMS device can be driven mechanically, such as for use as a differential sensor, microphone, vibration sensor, or other sensor. The MEMS device can also be driven electrically, such as to create mechanical motion as an actuator or a speaker.

The MEMS device includes at least one dielectric 150. Referring to FIG. 2 , according to a possible embodiment, the dielectric 150 can be a solid dielectric that can include a plurality of apertures 156. The apertures 156 are illustrated as cylindrical for convenience purposes, but can take any useful shape. The dielectric 150 can surround the second end 122 of the second electrode 120 and the first end 131 of the third electrode 130. The first end 121 of the second electrode 120 and the second end 132 of the third electrode 130 can be located outside of the solid dielectric 150. According to a possible embodiment, the dielectric 150 can fill at least 50% of a distance between the first and second electrode 120. The distance can be perpendicular to the first length of the first electrode 110. For example, the dielectric 150 can fill at least 75% of the distance, at least 80% of the distance, at least between 80-90% of the distance. However, the dielectric 150 can fill any amount from 1% to 99% of the distance. The more the dielectric fills the gap between the electrodes, the more the capacitance changes per unit of displacement and thus the higher the force generated for a given voltage bias between electrodes. Some minimal gap should remain between the dielectric and the electrodes, subject to fabrication constraints, so that the dielectric and electrodes remain moveable relative to each other. While some embodiments show the solid dielectric 150 having apertures 156, such as channels or passages, the solid dielectric 150 can also take other forms such as one or more segments or members, as shown in other embodiments.

The dielectric 150 can be movable relative to the first, second, and third electrodes. For example, the dielectric 150 can be substantially and deliberately movable beyond slight movement due to incidental flexing, bending, bumping, and other slight movement of the dielectric 150. Furthermore, when the dielectric 150 can be movable parallel to the axis 160 relative to the first, second, and third electrodes, the first, second, and third electrodes can also be movable relative to the dielectric 150. Thus, by the electrodes and dielectric 150 being movable relative to each other, the electrodes and/or the dielectric 150 may or may not be fixed or movable relative to other elements of the MEMS device, relative to earth, and/or relative to any other point of reference.

A first capacitance exists between the first electrode 110 and the second electrode 120. A second capacitance exists between the first electrode 110 and the third electrode 130. The capacitance between electrodes can be a function of the dielectric 150. For example, values of the first and second capacitance can change in opposite directions when there is motion of the dielectric 150 in a direction parallel to the axis 160 relative to the electrodes. For example, when the dielectric 150 moves and causes the first capacitance to increase, the second capacitance can decrease. An electrostatic force on the dielectric 150 relative to the electrodes 110, 120, and 130 can be substantially unchanged relative to the displacement.

The first electrode 110 can be disposed at least partially within a first aperture of the plurality of apertures 156. The second end 122 of the second electrode 120 can be disposed within a second aperture of the plurality of apertures 156. The first end 131 of the third electrode 130 can be disposed within a third aperture of the plurality of apertures 156. The first, second, and third apertures can be different apertures.

The dielectric 150 can include a first surface 151 and a second surface 152. The first surface 151 and the second surface 152 can be parallel to a plane perpendicular to the axis 160. The first end 111 and the second end 112 of the first electrode 110 can be located outside of the dielectric 150. The first electrode 110 second end 112 and the third electrode 130 second end 132 can extend beyond the dielectric 150 second surface 152. The second electrode 120 first end 121 can extend beyond the dielectric 150 first surface 151. The first electrode 110 first end 111 can also extend beyond the dielectric 150 first surface 151.

In an embodiment, the first electrode 110 can be an electrically conductive pin of a plurality of first electrically conductive pins electrically connected to each other. The second electrode 120 can be an electrically conductive pin of a plurality of second electrically conductive pins electrically connected to each other. The third electrode 130 can be an electrically conductive pin of a plurality of third electrically conductive pins electrically connected to each other.

Referring to FIG. 3 , according to a possible embodiment, the first electrode can be a plurality of first electrodes 110-x, the second electrode can be a plurality of second electrodes 120-x, and the third electrode can be a plurality of third electrodes 130-x. The plurality of second and third electrodes 120-x and 130-x can be staggered on either side of the plurality of first electrodes 110-x. This can allow for more capacitance and an increase in the change of capacitance with displacement. Other configurations of conductive and dielectric elements, such as bars or rings, can also be used. The plurality of first electrodes 110-x may be referred to collectively as a first plurality of electrodes. Similarly, the plurality of second electrodes 120-x may be referred to collectively as a second plurality of electrodes, and the plurality of third electrodes 130-x may be referred to collectively as a third plurality of electrodes.

Referring to FIGS. 4-7 to accommodate the pluralities of conductive pins connected to each other, the first, second, and third apertures 156 can be respective first, second, and third pluralities of apertures 156. The first plurality of electrically conductive pins can be arranged in a two-dimensional array in a plane perpendicular to the axis 160. The second and third plurality of electrically conductive pins can be arranged in respective two-dimensional arrays in a plane perpendicular to the axis 160 and interspersed among the first plurality of electrically conductive pins. According to a possible embodiment, the dielectric 150 can be considered a non-conductive electrical field modulating member, depending on the implementation.

Referring to FIG. 4 , the MEMS device can include a diaphragm 170 coupled to at least the first electrodes 110-x. The diaphragm 170 can have a substantially planar surface 172 perpendicular to the axis 160. The surface 172 can be substantially planar in that there may be imperfections on the surface 172 or the surface 172 may be slightly curved or uneven while still allowing the surface 172 to operate in a manner useful for a diaphragm. The diaphragm 170 can also have sandwiched layers.

According to a possible embodiment, the diaphragm 170 can be a first diaphragm coupled to the first electrodes 110-x and the third electrodes 130-x. The MEMS device can include a second diaphragm 174 coupled to the first electrodes 110-x and the second electrodes 120-x. The second diaphragm 174 can be located on an opposite side of the dielectric 150 from the first diaphragm 170. The second diaphragm 174 can have a substantially planar surface 176 perpendicular to the axis 160. The first diaphragm 170 and the second diaphragm 174 are spaced from the dielectric 150 to permit relative movement between the electrodes connected to the first and second diaphragms and the dielectric 150. A low-pressure region can be established and sealed between the diaphragms 170 and 174 in order to reduce noise and damping of the structure. The first electrodes 110-x are connected to both the first diaphragm 170 and the second diaphragm 174 and prevent the diaphragms from collapsing onto the dielectric 150. This low-pressure region can be substantially a vacuum such as a pressure less than 1 Torr, less than 300 mTorr, or less than 100 mTorr.

The diaphragms 170 and 174 can be made of a dielectric material, such as silicon nitride. The dielectric 150 can be silicon nitride. The electrodes 110-x, 120-x, and 130-x can be poly silicon. However, other materials can be used. For example, one or more of the diaphragm 170, the diaphragm 174, and the dielectric 150 can be polyimide. As another example, conductors for the electrodes can be plated metals.

Referring to FIG. 4 , the dielectric 150 is fixed in position with its periphery attached to a substrate 180 by means of spacer layers 182, 184, and 186. The peripheries of the diaphragms are also attached to the substrate 180 by means of spacer layers 182, 184, and 186. The dielectric 150 is relatively thick and stiff compared to the diaphragms 172 and 174 and remains relatively motionless when the diaphragms 172 and 174 are deflected. Deflection of the diaphragms 172 and 174 moves the electrodes 110-x, 120-x, and 130-x relative to the dielectric 150.

FIG. 5 shows a perspective view of the MEMS device of FIG. 4 , which is partially constructed, showing only second diaphragm 174, first electrodes 110-x, and second electrodes 120-x. An example interconnect 114 is shown electrically connecting the electrodes 110-x (e.g., the pins of a first electrode) while an example interconnect 124 is shown electrically connecting the electrodes 120-x (e.g., the pins of a second electrode).

FIG. 6 continues the construction of the MEMS device of FIG. 4 with the addition of dielectric 150 containing apertures 156 with the first and second electrodes placed within the apertures 156.

FIG. 7 continues the construction of the MEMS device of FIG. 4 with placement of the third electrodes 130-x and an example interconnect 134 electrically connecting the third electrodes 130-x (e.g., the pins of the third electrode 130-x). The construction continues with the addition of the first diaphragm 170 and the removal of the central region of spacer layers 182, 184, and 186 by a sacrificial etch to form the MEMS device of FIG. 4 .

Referring to FIGS. 8 and 9 , the MEMS device can include a fourth electrode 140. The fourth electrode 140 can have a first end 141 and a second end 142. The dielectric 150 can surround the first end 111 of the first electrode 110 and the second end 142 of the fourth electrode 140. The second end 112 of the first electrode 110 and the first end 141 of the fourth electrode can be located outside the dielectric 150. The fourth electrode 140 may or may not be electrically coupled to the first electrode 110. Referring to FIG. 9 , the fourth electrode 140 can be coaxial with the first electrode 110, such as by being located in the same aperture.

Referring to FIG. 4 , the second electrodes 120-x can be coaxial with respective third electrodes 130-x. Referring to FIGS. 9-11 , the second electrodes 120-x can be coaxial with the respective third electrodes 130-x. For example, the second and third electrodes can be located in the same aperture. Referring to FIGS. 10 and 11 , an optional dielectric support layer D can be present between the second and third electrodes 120 and 130. The dielectric support layer D may or may not have same cross-sectional area as the second and third electrodes 120 and 130. The dielectric D can be used for structural purposes while considering any additional parasitic capacitance. For example, the dielectric D can be used to prevent collapse or contact between the second electrode 120 and the third electrode 130 if the cavity between the diaphragms is under a vacuum.

Referring to FIG. 10 , the MEMS device, acting as a sensor such as used in a microphone, can include a first charge amplifier 194 coupled to the second electrode 120. The first charge amplifier 194 can bias the second electrode 120 to a first potential relative to the first electrode 110. The MEMS device can include a second charge amplifier 196 coupled to the third electrode 130. The second charge amplifier 196 can bias the third electrode 130 to a second potential relative to the first electrode 110. The first potential can be substantially equal to the second potential. The first potential can also be different from the second potential. The first and second charge amplifiers 194 and 196 can produce complementary outputs when the dielectric 150 is moved relative to the electrodes. For example, Q=C*V and when using a charge amplifier, V is held constant. When C goes up, Q can go up and vice versa. This can lead to complementary outputs.

For example, according to a possible embodiment, one electrode, such as the electrode 110 can be full length and another electrode can be segmented, such as into electrodes 120 and 130. The first electrode 110 can be biased. Using charge amplifiers 194 and 196, driven electrodes 120 and 130 can be biased to a fixed potential, i.e. ground, by a very high value resistance across the feedback capacitor. The charge amplifiers 194 and 196 can produce complementary outputs when the dielectric 150 is moved along an axis substantially parallel to the lengths of the first, second, and third electrodes.

Referring to FIG. 11 , the MEMS device, acting as a sensor, such as used in a microphone, can include a high input impedance voltage amplifier 1000 including a first input 1010 and a second input 1020. The first input 1010 can be coupled to the second electrode 120 and the second input 1020 can be coupled to the third electrode 130. The inputs 1010 and 1020 are biased to a fixed potential, i.e. ground, by very high value resistances. As discussed above, Q=C*V. When using a high impedance amplifier, Q can be held constant since there is no current. When C goes up, V goes down, and vice versa. This can lead to a complementary output.

Referring to FIG. 12 , the MEMS device 100 or any other disclosed MEMS device can be part of a sensor package 1200. The sensor package 1200 can include an enclosure 1111 that can include a base 1110 and a cover 1105, such as a can or any other cover, coupled to the base 1110. The first, second, and third electrodes 110-x, 120-x, and 130-x, and the solid dielectric 150 can be located within the enclosure 1111. For example, the enclosure 1111 can enclose a MEMS device between the cover 1105 and the base 1110. The sensor package 1100 can include an external-device interface 1520 disposed on the base 1110. The external-device interface 1520 can be implemented as a surface-mount interface or can include leads configured for through-hole mounting on a host device.

The sensor package 1200 can include an integrated circuit 1530, such as an Application Specific Integrated Circuit (ASIC) electrically coupled to the first, second, and third electrodes 110, 120, and 130. The integrated circuit 1530 can also be coupled to contacts of the external-device interface 1520, such as via an electrical lead 1534 and/or leads running through the base 1110. The integrated circuit 1530 can receive an electrical signal from the MEMS device 100, such as via an electrical lead 1532, and can communicate, such as via the electrical lead 1534 and/or leads in the base 1110, with a host device by using the contacts of the external device interface 1520. According to a possible implementation, the integrated circuit 1530 can be covered by a protective coating 1526.

According to a possible embodiment, the base 1110 can include a sound port 1150. The MEMS device 100 can be acoustically coupled to the sound port 1150. For example, the sound port 1150 can be an aperture in the base 1110 that allows sound to pass through the base to the MEMS device 100. Illustrated embodiments can be considered a bottom port embodiment, but the sound port 1150 can be located at other locations on the transducer assembly. For example, the sound port 1150 can also be on the cover 1105 for a top-port transducer assembly. The sound port 1150 can further be on a side of the sensor package 1100, the sound port 1150 can be anywhere else on the sensor package 1100, or there can be no sound port 1150, such as for a MEMS die vibration sensor or other sensor. According to a possible embodiment, when the MEMS device 100 includes at least one diaphragm 170 and/or 174 the diaphragm 170 and/or 174 can be acoustically coupled to the sound port 1150. According to other embodiments, the MEMS device 100 may not be used in a sensor package, such as when the MEMS device 100 is an actuator, as discussed above.

Referring to FIG. 13 , the MEMS device, such as the MEMS device 400 or any other disclosed MEMS device, acting as an actuator such as used in a speaker, is connected to an amplifier 1310. The output of the amplifier 1310 is connected to the first electrodes 110-x of the MEMS device. The second and third electrodes 120-x and 130-x are connected to the power supply rails, V₁ and V₂, respectively. The output of the amplifier 1310 varies between the power supply rail values of V₁ and V₂ in response to an input signal. When the amplifier output is mid rail, (V₁+V₂)/2, the electrostatic force applied to the electrodes, and hence to the diaphragms 170 and 172, is balanced. As the amplifier output approaches one of the power supply rails, the electrostatic force applied to the electrodes, and hence the diaphragms, reaches a maximum in one direction. As the amplifier output approaches the opposite power supply rail, the electrostatic force applied to the electrodes, and hence the diaphragms, reaches a maximum in the other direction. Each of the electrostatic forces is proportional to the square of the applied voltage. However, the net force is linear with the applied voltage and hence is linear with the input to the amplifier.

The amplifier 1310 can be a Pulse Width Modulation (PWM) or a Pulse Density Modulations (PDM) amplifier where its output is digital, swinging between the two power supply rails. The average value of a PWM amplifier's output and the average value of a PDM amplifier's output are a function of their input. The output of the digital amplifier is applied to the first electrodes 110-x. The second and third electrodes 120-x and 130-x are connected to the power supply rails, V₁ and V₂, respectively. The net force thus produced is linear with the input to the digital amplifier. The diaphragms can couple their movement directly to air hence producing sound or they can couple their movement through an auxiliary diaphragm to move air and thus produce sound.

According to a possible embodiment, a MEMS device can include a solid dielectric, the dielectric can have a first outer surface and a second outer surface opposite the first outer surface. The dielectric can have a plurality of passages, such as apertures, each of the plurality of passages can have an opening on the first outer surface and an opening on the second outer surface. The MEMS device can be a MEMS transducer. The MEMS device can include an electrode set. The dielectric and electrode set can be movable relative to each other.

The electrode set can include a first electrode partially disposed within a first passage of the plurality of passages such that a first end of the first electrode extends beyond the first outer surface and a second end of the first electrode extends beyond the second outer surface. The first electrode can be an electrode of a plurality of first electrodes electrically connected to each other.

The electrode set can include a second electrode disposed partially within a second passage of the plurality of passages such that a first end of the second electrode extends beyond the first outer surface and a second end of the second electrode is within the second passage. The second electrode can be an electrode of a plurality of second electrodes electrically connected to each other.

The electrode set can include a third electrode disposed partially within a third passage of the plurality of passages such that a first end of the third electrode is within the third passage and a second end of the third electrode extends beyond the second outer surface. The third electrode can be an electrode of a plurality of third electrodes electrically connected to each other. The first, second, and third electrodes can be fixed relative to one another.

According to another possible embodiment, an apparatus can include an electrode set and a dielectric member. The electrode set can include at least a first, a second, and a third electrode. The electrodes of the electrode set can each have an individual height with a top and bottom surface at the ends of each height. A capacitance exists between at least the first and second electrodes and the first and third electrodes of the electrode set.

The dielectric member can have a height with a top and bottom surface at the ends of the height. The dielectric member can have holes through the member such that the dielectric member surrounds the electrode set and is spaced from each electrode in the electrode set. The dielectric member may not be in mechanical contact with any electrode in the electrode set.

The top surface of the first electrode of the electrode set can be above the top surface of the dielectric member and the bottom surface of the first electrode of the electrode set can be below the bottom surface of the dielectric member. The top surface of the second electrode of the electrode set can be above the top surface of the dielectric member and the bottom surface of the second electrode can be between the top surface and the bottom surface of the dielectric member. The top surface of the third electrode of the electrode set can be between the top surface and the bottom surface of the dielectric member and the bottom surface of the third electrode of the electrode set can be below the bottom surface of the dielectric member.

The physical positions of the electrodes of the electrode set can be substantially fixed relative to one another. The physical position of the electrode set relative to the position of the dielectric member can be allowed movement.

The relative position of each electrode to the others can be substantially fixed. Some electrodes can be fixed while allowing others to move. For instance, the first electrode and the dielectric member can be fixed together and the second and third electrodes can be allowed to move relative to the dielectric member. Other configurations are possible.

The first electrode of the electrode set can be split into two electrically independent members. The first member can have the top surface and a second bottom surface. The second member can have a second top surface and the bottom surface. The top surface of the first member of the first electrode can be above the top surface of the dielectric member. The second bottom surface of the first member of the first electrode can be between the top and bottom surfaces of the dielectric member. The second top surface of the second member of the first electrode can be between the top and bottom surfaces of the dielectric member and the bottom surface of the second member of the first electrode can be below the bottom surface of the dielectric member.

According to a possible embodiment, a MEMS device can include a solid dielectric including a plurality of apertures. The MEMS device can include a first plurality of electrodes, the first plurality of electrodes extending completely through a first subset of the plurality of apertures. The MEMS device can include a second plurality of electrodes, the second plurality of electrodes extending partially into a second subset of the plurality of apertures. The second subset can be different from the first subset. The MEMS device can include a third plurality of electrodes, the third plurality of electrodes extending partially into a third subset of the plurality of apertures. The third subset can be different from the first subset.

According to a possible implementation of the above embodiment, the solid dielectric can include a first side and a second side opposite from the first side. The plurality of apertures can extend from the first side to the second side. The second plurality of electrodes can extend partially into the second subset from the first side. The third plurality of electrodes can extend partially into the third subset from the second side. The second subset can be the same as or different from the third subset.

Turning to FIGS. 14-16 , a MEMS device 1400 can include a first support layer 1474 and a second support layer 1470. Each support layer 1474 and 1470 can be a single layer or can include a plurality of layers. The support layers 1474 and 1470 can have at least one planar surface, such as the surface 1475, for mounting electrodes. The support layers 1474 and 1470 can be made of polymer, silicon nitride, ceramic, an insulator, a combination of an insulator and a conductor, or any other material or materials that can support electrodes.

The MEMS device 1400 can include a solid dielectric 1450 suspended between the first support layer 1474 and the second support layer 1470 such that the solid dielectric 1450 moves relative to the support layers 1474 and 1470. The concept of “movement relative to” is defined as deliberate movement beyond subtle movements of structures that are otherwise fixed. For example, the solid dielectric 1450 can be suspended freely between the first support layer 1474 and the second support layer 1470 such that is moves relative to the support layers 1474 and 1470.

According to an embodiment, the first support layer 1474 can have the surface 1475 facing the dielectric 1450. The second support layer 1470 can have a surface (not shown) facing the dielectric 1450. The dielectric 1450 can move in a direction perpendicular 1632 to the surfaces of the support layers 1470 and 1474 and can be fixed relative to a direction 1634 parallel with the surfaces of the support layers 1470 and 1474.

According to an embodiment, the first support layer 1474 can be a first plate, the second support layer 1470 can be a second plate, and a cavity 1490 can be formed between the first plate and the second plate. The cavity 1490 between the first plate and the second plate can be sealed at a lower pressure than ambient pressure. The ambient pressure is the pressure of the surrounding medium on the device 1400. For example, the cavity 1490 can be a sealed vacuum chamber between the first plate and the second plate. A vacuum can be established within an interior region of the cavity 1490 between the first support layer 1474 and the second support layer 1470 to reduce viscous damping of dielectric 1450 when it moves.

The MEMS device 1400 can include a first plurality of electrodes 1410 coupled to the first support layer 1474 and the second support layer 1470. The dielectric 1450 can include a plurality of apertures 1500 and the first plurality of electrodes 1410 can extend through a first subset 1510 of the plurality of apertures 1500. The MEMS device 1400 can include a second plurality of electrodes 1420 coupled to the first support layer 1474. The second plurality of electrodes 1420 can extend partially into a second subset 1520 of the plurality of apertures 1500. The MEMS device 1400 can include a third plurality of electrodes 1430 coupled to the second support layer 1470. The third plurality of electrodes 1430 can extend partially into a third subset 1530 of the plurality of apertures 1500. The electrodes 1410, 1420, and 1430 can be plated metal, polysilicon, or any other conductive material.

According to an embodiment, the second subset 1520 can be the same as the third subset 1530 of the plurality of apertures 1500. Thus, each electrode of the second plurality of electrodes 1420 can be in the same aperture as each electrode of the third plurality of electrodes 1430 and each electrode of the second plurality of electrodes 1420 can be coaxial with each electrode of the third plurality of electrodes 1430 within the second subset 1530 of apertures. According to another embodiment, the second subset 1520 can be different from the third subset 1530, which would place the second plurality of electrodes 1420 in different apertures than the third plurality of electrodes 1430.

In some embodiments, the solid dielectric 1450 can be coupled to a fixed section 1540 sandwiched between a first spacer 1484 and the first support layer 1474 and sandwiched between a second spacer 1486 and the second support layer 1470, but even in these embodiments the solid dielectric 1450 may still be considered suspended between the first support layer 1474 and the second support layer 1470. The spacers 1484 and 1486 can provide additional support for the support layers 1474 and 1470 and for the dielectric 1450. The spacers 1484 and 1486 can be made of silicon oxide, photoresist, insulator, conductor, or any other layer or plurality of layers. In some embodiments, the solid dielectric 1450 and the section 1540 are made of a single material, but they can also be made of different materials.

According to a possible embodiment, the MEMS device 1400 can include a substrate 1480. The first and second support layers 1474 and 1470 can be fixed relative to the substrate 1480. The substrate 1480 can be located on an opposite side of the first layer 1474 from the solid dielectric 1450. While first layer 1474 can be an insulator, there also can be an insulator layer 1482 between the first layer 1474 and the substrate 1480 to insulate the first and second electrodes 1410 and 1420 from the substrate 1480.

The dielectric 1450 can be coupled to the support layers 1474 and 1470 via a flexible support 1710. For example, the dielectric 1450 can be coupled to the flexible support 1710, which can be coupled to the fixed section 1540, which can be coupled to the spacers 1484 and 1486, which can be coupled to the respective support layers 1474 and 1470.

According to some embodiments, the MEMS device 1400 can be or can be part of a sensor, such as an accelerometer, a vibration sensor, a bone conduction microphone, or other sensor. According to other embodiments, the MEMS device 1400 can be or can be part of an actuator, such as a resonator, a vibrator, or other actuator.

Turning to FIG. 16 , the MEMS device 1400 can include first protrusions 1610 extending partially into a gap between the solid dielectric 1450 and the first support layer 1474. The MEMS device 1400 can also include second protrusions 1620 extending partially into a gap between the second support layer 1470 and the solid dielectric 1450. For example, the protrusions 1610 and 1620 can be over-travel stops and can be implemented as bumps between the moveable solid dielectric 1450 and the two support layers 1474 and 1470. The protrusions 1610 and 1620 can prevent the dielectric 1450 from getting electrostatically stuck to a support layer. According to a possible embodiment, the first protrusions 1610 can be coupled to the dielectric 1450 and the second protrusions 1620 can be coupled to the second support layer 1470, but the protrusions 1610 and 1620 can also be attached to other combinations of the layers 1474 and 1470 and the dielectric 1450.

The MEMS device 1400 can be incorporated into various embodiments described in FIGS. 1-13 . For example, according to a possible embodiment, the MEMS device can include the amplifier 1310 in FIG. 13 , where the electrodes 110-x, 120-x, and 130-x can correspond to respective electrodes 1410, 1420, and 1430 and the dielectric 150 can correspond to the dielectric 1450. As described above, the amplifier 1310 can include an output coupled to the first electrodes. The second electrodes can be connected to the power supply rail V₁. The third electrodes can be connected to the power supply rails V₂. The amplifier 1310 can drive the electrodes relative to each other to cause the dielectric to move in a direction parallel in the direction the electrodes run through the apertures, such as for use as an actuator, resonator, vibrator, or other device driven by an amplifier. This can be different from some embodiments above, where the amplifier 1310 drives electrodes to cause the diaphragm coupled to the electrodes to move. For example, the amplifier 1310 can drive the first electrodes relative to the second and third electrodes. The sum of the voltage between the first and second electrodes and the voltage between the first and third electrodes is constant and is the difference between the power supply rails. The force produced on the dielectric is linear with the drive voltage on the first electrode and thus directly proportional to the input to the amplifier or, in the case of a digital output, the force is linear with the average value of the signal on the first electrode.

According to an embodiment, the MEMS device can include a differential voltage amplifier, such as the amplifier 1000 of FIG. 11 , where the electrodes 110, 120, and 130 can correspond to respective electrodes 1410, 1420, and 1430. The amplifier 1000 can have inputs connected to the second and third plurality of electrodes. The amplifier 1000 can have a voltage source connected to the first plurality of electrodes. For example, the MEMS device can act as a sensor.

According to an embodiment, the MEMS device can include an enclosure, such as the enclosure 1111 of FIG. 12 . The enclosure 1111 can include a base 1110 and a cover 1105 coupled to the base 1110. The cover 1105 and base 1110 can define the enclosure 1111 in which the first, second, and third electrodes and the solid dielectric are disposed.

According to an embodiment, the first plurality of electrodes can be arranged in a two-dimensional array, such as shown in in FIGS. 5-7 , where the electrodes 110-x, 120-x, and 130-x can correspond to respective electrodes 1410, 1420, and 1430 and the dielectric 150 can correspond to the dielectric 1450. The second and third plurality of electrodes can be arranged in respective two-dimensional arrays interspersed among the first plurality of electrodes. Also, the first plurality of electrodes can be longer than the second and third plurality of electrodes. Additionally, the first plurality of electrodes can be connected using interconnects 114 and the second plurality of electrodes can be connected using the interconnects 124 of FIG. 5 . The third plurality of electrodes can be connected using the interconnects 134 of FIG. 7 .

FIG. 17 is an example isometric view of a dielectric layer 1700 and FIG. 18 is an example isometric view of a dielectric layer 1800 of a MEMS device according to different embodiments. The layers 1700 and 1800 can include the dielectric 1450, the fixed section 1540, and the apertures 1500. FIG. 17 illustrates a possible flexible support 1720 coupled between the solid dielectric 1450 and the fixed section 1540. FIG. 18 illustrates another possible flexible support in the form of a plurality of springs 1730 coupled between the dielectric 1450 and the fixed section 1540. Thus, the plurality of springs 1730 can be coupled between the dielectric 1450 and the substrate 1480 of FIGS. 14-16 via the fixed section 1540, where the plurality of springs 1730 can allow the solid dielectric to move relative to the substrate 1480. For example, springs 1730 can provide a spring support that is used so that the dielectric 1450 moves parallel to a direction that electrodes permeate the apertures 1500. The springs 1730 can establish compliance, such as by being flexible, in a vertical, such as up and down, direction of a longitudinal axis of the apertures 1500 and can be stiff in horizontal, such as lateral, directions perpendicular to the longitudinal axis of the apertures 1500 from one side to another side of the dielectric 1450. According to this embodiment, the springs 1730 can be structurally symmetrical so that tension is released without causing the dielectric 1450 to move to one side or the other. The springs can also take other forms and shapes.

According to an embodiment, a transducer assembly can include a base and a cover coupled to the base. The cover and base can define an enclosure. The transducer assembly can include a transducer disposed on the base within the enclosure. The transducer can include a first support layer and a second support layer. The transducer can include a solid dielectric suspended between the first support layer and the second support layer such that the solid dielectric moves relative to the first support layer and the second support layer. The solid dielectric can include a plurality of apertures. The transducer can include a first plurality of electrodes coupled to the first support layer and the second support layer. The first plurality of electrodes can extend through a first subset of the plurality of apertures. The transducer can include a second plurality of electrodes coupled to the first support layer. The second plurality of electrodes can extend partially into a second subset of the plurality of apertures. The transducer can include a third plurality of electrodes coupled to the second support layer. The third plurality of electrodes can extend partially into a third subset of the plurality of apertures.

According to an implementation, the transducer can include a substrate. The first and second support layers can be fixed relative to the substrate. According to an implementation, the first support layer can be a first plate. The second support layer can be a second plate. A vacuum chamber can be formed between the first plate and the second plate.

According to an implementation, the transducer can include first protrusions extending partially into a gap between the first support layer and the solid dielectric. The transducer can include second protrusions extending partially into a gap between the second support layer and the solid dielectric.

According to an implementation, the first support layer can have a surface facing the dielectric. The second support layer can have a surface facing the dielectric. The dielectric can be suspended freely and can move relative to a direction perpendicular to the surfaces of the support layers. The solid dielectric can be fixed relative to a direction parallel with the surfaces of the support layers.

According to an implementation, the transducer can include a substrate. The first and second support layers can be fixed relative to the substrate. The transducer can include a plurality of springs coupled between the solid dielectric and the substrate. The plurality of springs can allow the solid dielectric to move relative to the substrate.

At least some embodiments can provide a dual opposed dielectric structure with the dielectric element being moveable and electrodes being fixed. The dual opposed dielectric structure can be used to create a high sensitivity sensor, such as an accelerometer or other sensor, or an actuator, such as a resonator, vibrator, or other actuator. A local vacuum surrounding the dielectric can provide for high signal-to-noise ratio by minimizing viscous damping of the dielectric. Over-travel limits, such as protrusions, can provide for robustness.

While this disclosure has been described with specific embodiments thereof, it is evident that many alternatives, modifications, and variations will be apparent to those skilled in the art. For example, various components of the embodiments may be interchanged, added, or substituted in the other embodiments. Also, all of the elements of each figure are not necessary for operation of the disclosed embodiments. For example, one of ordinary skill in the art of the disclosed embodiments would be enabled to make and use the teachings of the disclosure by simply employing the elements of the independent claims. Accordingly, embodiments of the disclosure as set forth herein are intended to be illustrative, not limiting. Various changes may be made without departing from the spirit and scope of the disclosure.

In this document, relational terms such as “first,” “second,” and the like may be used solely to distinguish one entity or action from another entity or action without necessarily requiring or implying any actual such relationship or order between such entities or actions. The phrase “at least one of” “at least one selected from the group of” or “at least one selected from” followed by a list is defined to mean one, some, or all, but not necessarily all of, the elements in the list. The terms “comprises,” “comprising,” “including,” or any other variation thereof, are intended to cover a non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements does not include only those elements but may include other elements not expressly listed or inherent to such process, method, article, or apparatus. An element proceeded by “a,” “an,” or the like does not, without more constraints, preclude the existence of additional identical elements in the process, method, article, or apparatus that comprises the element. Also, the term “another” is defined as at least a second or more. The terms “including,” “having,” and the like, as used herein, are defined as “comprising.” Furthermore, the background section is not admitted as prior art, is written as the inventor's own understanding of the context of some embodiments at the time of filing, and includes the inventor's own recognition of any problems with existing technologies and/or problems experienced in the inventor's own work. 

We claim:
 1. A microelectromechanical systems (MEMS) device comprising: a first support layer; a second support layer; a solid dielectric suspended between the first support layer and the second support layer such that the solid dielectric moves relative to the first support layer and the second support layer, where the solid dielectric includes a plurality of apertures; a first plurality of electrodes coupled to the first support layer and the second support layer, the first plurality of electrodes extending through a first subset of the plurality of apertures; a second plurality of electrodes coupled to the first support layer, the second plurality of electrodes extending partially into a second subset of the plurality of apertures; and a third plurality of electrodes coupled to the second support layer, the third plurality of electrodes extending partially into a third subset of the plurality of apertures.
 2. The MEMS device according to claim 1, further comprising a substrate, where the first and second support layers are fixed relative to the substrate.
 3. The MEMS device according to claim 1, wherein the first support layer comprises a first plate, wherein the second support layer comprises a second plate, and wherein a cavity is formed between the first plate and the second plate.
 4. The MEMS device according to claim 3, wherein the cavity between the first plate and the second plate is sealed at a lower pressure than ambient pressure.
 5. The MEMS device according to claim 1, further comprising: first protrusions extending partially into a gap between the first support layer and the solid dielectric; and second protrusions extending partially into a gap between the second support layer and the solid dielectric.
 6. The MEMS device according to claim 1, wherein the first support layer comprises a surface facing the dielectric, wherein the second support layer comprises a surface facing the dielectric, wherein the dielectric moves in a direction perpendicular to the surfaces of the support layers, and wherein the dielectric is fixed relative to a direction parallel with the surfaces of the support layers.
 7. The MEMS device according to claim 1, further comprising: a substrate, where the first and second support layers are fixed relative to the substrate; and a plurality of springs coupled between the solid dielectric and the substrate, where the plurality of springs allows the solid dielectric to move relative to the substrate.
 8. The MEMS device according to claim 1, further comprising an amplifier comprising: an output coupled to the first electrode; a first power supply rail coupled to the second electrode; and a second power supply rail coupled to the third electrode.
 9. The MEMS device according to claim 1, further comprising: a differential voltage amplifier with inputs connected to the second and third plurality of electrodes, and a voltage source connected to the first plurality of electrodes.
 10. The MEMS device according to claim 1, wherein the second subset is the same as the third subset of the plurality of apertures.
 11. The MEMS device according to claim 10, wherein electrodes of the second plurality of electrodes are coaxial with electrodes of the third plurality of electrodes within the second subset of the plurality of apertures.
 12. The MEMS device according to claim 1, further comprising: an enclosure comprising: a base; and a cover coupled to the base, the cover and base defining the enclosure in which the first, second, and third electrodes and the solid dielectric are disposed.
 13. The MEMS device according to claim 1, wherein the first plurality of electrodes is arranged in a two-dimensional array, and wherein the second and third plurality of electrodes are arranged in respective two-dimensional arrays interspersed among the first plurality of electrodes.
 14. The MEMS device according to claim 1, wherein the first plurality of electrodes is longer than the second and third plurality of electrodes.
 15. A transducer assembly, comprising: a base; a cover coupled to the base, the cover and base defining an enclosure; and a transducer disposed on the base within the enclosure, the transducer comprising: a first support layer; a second support layer; a solid dielectric suspended between the first support layer and the second support layer such that the solid dielectric moves relative to the first support layer and the second support layer, where the solid dielectric includes a plurality of apertures; a first plurality of electrodes coupled to the first support layer and the second support layer, the first plurality of electrodes extending through a first subset of the plurality of apertures; a second plurality of electrodes coupled to the first support layer, the second plurality of electrodes extending partially into a second subset of the plurality of apertures; and a third plurality of electrodes coupled to the second support layer, the third plurality of electrodes extending partially into a third subset of the plurality of apertures.
 16. The transducer assembly according to claim 15, where the transducer further comprises a substrate, where the first and second support layers are fixed relative to the substrate.
 17. The transducer assembly according to claim 15, wherein the first support layer comprises a first plate, wherein the second support layer comprises a second plate, wherein a sealed cavity is formed between the first plate and the second plate, and wherein the sealed cavity is at a pressure lower than ambient pressure.
 18. The transducer assembly according to claim 15, where the transducer further comprises: first protrusions extending partially into a gap between the first support layer and the dielectric; and second protrusions extending partially into a gap between the second support layer and the dielectric.
 19. The transducer assembly according to claim 15, wherein the first support layer comprises a surface facing the dielectric, wherein the second support layer comprises a surface facing the dielectric, wherein the dielectric is suspended freely and moves relative to a direction perpendicular to the surfaces of the support layers, and wherein the dielectric is fixed relative to a direction parallel with the surfaces of the support layers.
 20. The transducer assembly according to claim 15, where the transducer further comprises: a substrate, where the first and second support layers are fixed relative to the substrate; and a plurality of springs coupled between the dielectric and the substrate, where the plurality of springs allows the dielectric to move relative to the substrate. 